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High Oxygen Sensitivity of TiO(2) Thin Films Deposited by ALD
The gas sensitivity and structural properties of TiO(2) thin films deposited by plasma-enhanced atomic layer deposition (ALD) were examined in detail. The TiO(2) thin films are deposited using Tetrakis(dimethylamido)titanium(IV) and oxygen plasma at 300 °C on SiO(2) substrates followed by annealing...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609136/ https://www.ncbi.nlm.nih.gov/pubmed/37893312 http://dx.doi.org/10.3390/mi14101875 |