Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers

The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise leve...

Descripción completa

Detalles Bibliográficos
Autores principales: Tan, Hongyu, Pan, Debin, Wang, Chensheng, Yao, Yuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609305/
https://www.ncbi.nlm.nih.gov/pubmed/37893307
http://dx.doi.org/10.3390/mi14101870

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609305/
https://www.ncbi.nlm.nih.gov/pubmed/37893307
http://dx.doi.org/10.3390/mi14101870

Ejemplares similares