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Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers
The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise leve...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609305/ https://www.ncbi.nlm.nih.gov/pubmed/37893307 http://dx.doi.org/10.3390/mi14101870 |