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Cascaded 2D Micromirror with Application to LiDAR
This paper introduced a novel approach to enhance the vertical scanning angle of a large aperture 2D electromagnetic micromirror through the utilization of a cascaded torsional beam design. The primary objective was to increase the vertical scanning angle without compromising the robustness, which w...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609400/ https://www.ncbi.nlm.nih.gov/pubmed/37893391 http://dx.doi.org/10.3390/mi14101954 |