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Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method

This paper presents a Piezoelectric micromechanical ultrasonic transducer (PMUT) based on a Pt/ScAlN/Mo/SiO(2)/Si/SiO(2)/Si multilayer structure with a circular suspension film of scandium doped aluminum nitride (ScAlN). Multiphysics modeling using the finite element method and analysis of the effec...

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Detalles Bibliográficos
Autores principales:	Liu, Xiaonan, Zhang, Qiaozhen, Chen, Mingzhu, Liu, Yaqi, Zhu, Jianqiu, Yang, Jiye, Wang, Feifei, Tang, Yanxue, Zhao, Xiangyong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609439/ https://www.ncbi.nlm.nih.gov/pubmed/37893378 http://dx.doi.org/10.3390/mi14101942

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