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MEMS Differential Pressure Sensor with Dynamic Pressure Canceler for Precision Altitude Estimation

Atmospheric pressure measurements based on microelectromechanical systems (MEMSs) can extend accessibility to altitude information. A differential pressure sensor using a thin cantilever and an air chamber is a promising sensing element for sub-centimeter resolution. However, its vulnerability to wi...

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Detalles Bibliográficos
Autores principales:	Yasunaga, Shun, Takahashi, Hidetoshi, Takahata, Tomoyuki, Shimoyama, Isao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609560/ https://www.ncbi.nlm.nih.gov/pubmed/37893379 http://dx.doi.org/10.3390/mi14101941

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