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High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer
Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequ...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10610584/ https://www.ncbi.nlm.nih.gov/pubmed/37896719 http://dx.doi.org/10.3390/s23208626 |
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author | Mion, Thomas D’Agati, Michael J. Sofronici, Sydney Bussmann, Konrad Staruch, Margo Kost, Jason L. Co, Kevin Olsson, Roy H. Finkel, Peter |
author_facet | Mion, Thomas D’Agati, Michael J. Sofronici, Sydney Bussmann, Konrad Staruch, Margo Kost, Jason L. Co, Kevin Olsson, Roy H. Finkel, Peter |
author_sort | Mion, Thomas |
collection | PubMed |
description | Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed–fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co(1-x)Fe(x))-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron–cobalt–hafnium alloy (Fe(0.5)Co(0.5))(0.92)Hf(0.08) that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed. |
format | Online Article Text |
id | pubmed-10610584 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-106105842023-10-28 High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer Mion, Thomas D’Agati, Michael J. Sofronici, Sydney Bussmann, Konrad Staruch, Margo Kost, Jason L. Co, Kevin Olsson, Roy H. Finkel, Peter Sensors (Basel) Article Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed–fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co(1-x)Fe(x))-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron–cobalt–hafnium alloy (Fe(0.5)Co(0.5))(0.92)Hf(0.08) that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed. MDPI 2023-10-21 /pmc/articles/PMC10610584/ /pubmed/37896719 http://dx.doi.org/10.3390/s23208626 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Mion, Thomas D’Agati, Michael J. Sofronici, Sydney Bussmann, Konrad Staruch, Margo Kost, Jason L. Co, Kevin Olsson, Roy H. Finkel, Peter High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title | High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title_full | High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title_fullStr | High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title_full_unstemmed | High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title_short | High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer |
title_sort | high isolation, double-clamped, magnetoelectric microelectromechanical resonator magnetometer |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10610584/ https://www.ncbi.nlm.nih.gov/pubmed/37896719 http://dx.doi.org/10.3390/s23208626 |
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