Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology

A commercial thermo-optic phase shifter (TOPS) is an efficient solution to the imbalance problem in the fabrication process of Mach–Zehnder modulator (MZM) arms. The TOPS consumes electrical power and transforms it into thermal energy, which changes the real part of the effective refractive index at...

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Detalles Bibliográficos
Autores principales: Krause, Eylon Eliyahu, Malka, Dror
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10610627/
https://www.ncbi.nlm.nih.gov/pubmed/37896680
http://dx.doi.org/10.3390/s23208587

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10610627/
https://www.ncbi.nlm.nih.gov/pubmed/37896680
http://dx.doi.org/10.3390/s23208587

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