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Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology
A commercial thermo-optic phase shifter (TOPS) is an efficient solution to the imbalance problem in the fabrication process of Mach–Zehnder modulator (MZM) arms. The TOPS consumes electrical power and transforms it into thermal energy, which changes the real part of the effective refractive index at...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10610627/ https://www.ncbi.nlm.nih.gov/pubmed/37896680 http://dx.doi.org/10.3390/s23208587 |