Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration

A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor...

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Autores principales: Qi, Longheng, Li, Peian, Zhang, Xu, Wong, Ka Ming, Lau, Kei May
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10613616/
https://www.ncbi.nlm.nih.gov/pubmed/37899364
http://dx.doi.org/10.1038/s41377-023-01298-w
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author Qi, Longheng
Li, Peian
Zhang, Xu
Wong, Ka Ming
Lau, Kei May
author_facet Qi, Longheng
Li, Peian
Zhang, Xu
Wong, Ka Ming
Lau, Kei May
author_sort Qi, Longheng
collection PubMed
description A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor deposition (MOCVD)-grown GaN-on-Si epiwafer and AlGaInP red micro-LED arrays are both monolithically fabricated, followed by the integration with a common complementary metal oxide semiconductor (CMOS) backplane via flip-chip bonding technology to form a double-layer thin-film display structure. Full-color images with decent color gamut and brightness are successfully displayed through the fine adjustment of driving current densities of RGB subpixels. This full-color display combines the advantages of high quantum efficiency of InGaN material on blue/green light and AlGaInP material on red light through heterogeneous integration and high pixel density through monolithic fabrication approach, demonstrating the feasibility and prospects of high brightness, good color performance, and high-resolution micro-LED micro-displays in future metaverse applications.
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spelling pubmed-106136162023-10-31 Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration Qi, Longheng Li, Peian Zhang, Xu Wong, Ka Ming Lau, Kei May Light Sci Appl Article A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor deposition (MOCVD)-grown GaN-on-Si epiwafer and AlGaInP red micro-LED arrays are both monolithically fabricated, followed by the integration with a common complementary metal oxide semiconductor (CMOS) backplane via flip-chip bonding technology to form a double-layer thin-film display structure. Full-color images with decent color gamut and brightness are successfully displayed through the fine adjustment of driving current densities of RGB subpixels. This full-color display combines the advantages of high quantum efficiency of InGaN material on blue/green light and AlGaInP material on red light through heterogeneous integration and high pixel density through monolithic fabrication approach, demonstrating the feasibility and prospects of high brightness, good color performance, and high-resolution micro-LED micro-displays in future metaverse applications. Nature Publishing Group UK 2023-10-30 /pmc/articles/PMC10613616/ /pubmed/37899364 http://dx.doi.org/10.1038/s41377-023-01298-w Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Qi, Longheng
Li, Peian
Zhang, Xu
Wong, Ka Ming
Lau, Kei May
Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title_full Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title_fullStr Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title_full_unstemmed Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title_short Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
title_sort monolithic full-color active-matrix micro-led micro-display using ingan/algainp heterogeneous integration
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10613616/
https://www.ncbi.nlm.nih.gov/pubmed/37899364
http://dx.doi.org/10.1038/s41377-023-01298-w
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AT zhangxu monolithicfullcoloractivematrixmicroledmicrodisplayusinginganalgainpheterogeneousintegration
AT wongkaming monolithicfullcoloractivematrixmicroledmicrodisplayusinginganalgainpheterogeneousintegration
AT laukeimay monolithicfullcoloractivematrixmicroledmicrodisplayusinginganalgainpheterogeneousintegration

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