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Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays

The organic thin-film transistor is advantageous for monolithic three-dimensional integration attributed to low temperature and facile solution processing. However, the electrical properties of solution deposited organic semiconductor channels are very sensitive to the substrate surface and processi...

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Autores principales: Han, Lei, Ogier, Simon, Li, Jun, Sharkey, Dan, Yin, Xiaokuan, Baker, Andrew, Carreras, Alejandro, Chang, Fangyuan, Cheng, Kai, Guo, Xiaojun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10620182/
https://www.ncbi.nlm.nih.gov/pubmed/37914687
http://dx.doi.org/10.1038/s41467-023-42443-8
_version_ 1785130150942212096
author Han, Lei
Ogier, Simon
Li, Jun
Sharkey, Dan
Yin, Xiaokuan
Baker, Andrew
Carreras, Alejandro
Chang, Fangyuan
Cheng, Kai
Guo, Xiaojun
author_facet Han, Lei
Ogier, Simon
Li, Jun
Sharkey, Dan
Yin, Xiaokuan
Baker, Andrew
Carreras, Alejandro
Chang, Fangyuan
Cheng, Kai
Guo, Xiaojun
author_sort Han, Lei
collection PubMed
description The organic thin-film transistor is advantageous for monolithic three-dimensional integration attributed to low temperature and facile solution processing. However, the electrical properties of solution deposited organic semiconductor channels are very sensitive to the substrate surface and processing conditions. An organic-last integration technology is developed for wafer-scale heterogeneous integration of a multi-layer organic material stack from solution onto the non-even substrate surface of a III-V micro light emitting diode plane. A via process is proposed to make the via interconnection after fabrication of the organic thin-film transistor. Low-defect uniform organic semiconductor and dielectric layers can then be formed on top to achieve high-quality interfaces. The resulting organic thin-film transistors exhibit superior performance for driving micro light emitting diode displays, in terms of milliampere driving current, and large ON/OFF current ratio approaching 10(10) with excellent uniformity and reliability. Active-matrix micro light emitting diode displays are demonstrated with highest brightness of 150,000 nits and highest resolution of 254 pixels-per-inch.
format Online
Article
Text
id pubmed-10620182
institution National Center for Biotechnology Information
language English
publishDate 2023
publisher Nature Publishing Group UK
record_format MEDLINE/PubMed
spelling pubmed-106201822023-11-03 Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays Han, Lei Ogier, Simon Li, Jun Sharkey, Dan Yin, Xiaokuan Baker, Andrew Carreras, Alejandro Chang, Fangyuan Cheng, Kai Guo, Xiaojun Nat Commun Article The organic thin-film transistor is advantageous for monolithic three-dimensional integration attributed to low temperature and facile solution processing. However, the electrical properties of solution deposited organic semiconductor channels are very sensitive to the substrate surface and processing conditions. An organic-last integration technology is developed for wafer-scale heterogeneous integration of a multi-layer organic material stack from solution onto the non-even substrate surface of a III-V micro light emitting diode plane. A via process is proposed to make the via interconnection after fabrication of the organic thin-film transistor. Low-defect uniform organic semiconductor and dielectric layers can then be formed on top to achieve high-quality interfaces. The resulting organic thin-film transistors exhibit superior performance for driving micro light emitting diode displays, in terms of milliampere driving current, and large ON/OFF current ratio approaching 10(10) with excellent uniformity and reliability. Active-matrix micro light emitting diode displays are demonstrated with highest brightness of 150,000 nits and highest resolution of 254 pixels-per-inch. Nature Publishing Group UK 2023-11-01 /pmc/articles/PMC10620182/ /pubmed/37914687 http://dx.doi.org/10.1038/s41467-023-42443-8 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Han, Lei
Ogier, Simon
Li, Jun
Sharkey, Dan
Yin, Xiaokuan
Baker, Andrew
Carreras, Alejandro
Chang, Fangyuan
Cheng, Kai
Guo, Xiaojun
Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title_full Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title_fullStr Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title_full_unstemmed Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title_short Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays
title_sort wafer-scale organic-on-iii-v monolithic heterogeneous integration for active-matrix micro-led displays
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10620182/
https://www.ncbi.nlm.nih.gov/pubmed/37914687
http://dx.doi.org/10.1038/s41467-023-42443-8
work_keys_str_mv AT hanlei waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT ogiersimon waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT lijun waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT sharkeydan waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT yinxiaokuan waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT bakerandrew waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT carrerasalejandro waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT changfangyuan waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT chengkai waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays
AT guoxiaojun waferscaleorganiconiiivmonolithicheterogeneousintegrationforactivematrixmicroleddisplays