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Flat and roll-type translucent anodic porous alumina molds anodized in oxalic acid for UV nanoimprint lithography
There is much interest in UV nanoimprinting as a fabrication method for various functional devices because of its suitability for efficient fine patterning. To form patterns on opaque substrates by UV nanoimprinting, it is essential to use molds through which UV light can pass. In this study, transl...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10641565/ https://www.ncbi.nlm.nih.gov/pubmed/37964907 http://dx.doi.org/10.1039/d3ra06240f |