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High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm

Amorphous alumina is highly transparent across the visible spectrum, making it a promising candidate for low-loss waveguiding at short wavelengths. However, previous alumina waveguide demonstrations in the visible region have focused on low- to moderate-confinement waveguides, where the diffuse mode...

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Detalles Bibliográficos
Autores principales: McKay, Elissa, Pruiti, Natale G., May, Stuart, Sorel, Marc
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10645771/
https://www.ncbi.nlm.nih.gov/pubmed/37963923
http://dx.doi.org/10.1038/s41598-023-46877-4
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author McKay, Elissa
Pruiti, Natale G.
May, Stuart
Sorel, Marc
author_facet McKay, Elissa
Pruiti, Natale G.
May, Stuart
Sorel, Marc
author_sort McKay, Elissa
collection PubMed
description Amorphous alumina is highly transparent across the visible spectrum, making it a promising candidate for low-loss waveguiding at short wavelengths. However, previous alumina waveguide demonstrations in the visible region have focused on low- to moderate-confinement waveguides, where the diffuse mode reduces the design flexibility and integration density of photonic integrated circuits. Here, we have developed a high-quality etch mask and a highly selective BCl(3) plasma etch, allowing etching of amorphous alumina waveguides up to 800 nm thick. Using this process, we have fabricated waveguides using an alumina film grown by atomic layer deposition (ALD) which are the lowest-loss high-confinement waveguides for blue light to date: we achieve single-mode propagation losses of 0.8 dB/cm at a propagation wavelength of 450 nm.
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spelling pubmed-106457712023-11-14 High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm McKay, Elissa Pruiti, Natale G. May, Stuart Sorel, Marc Sci Rep Article Amorphous alumina is highly transparent across the visible spectrum, making it a promising candidate for low-loss waveguiding at short wavelengths. However, previous alumina waveguide demonstrations in the visible region have focused on low- to moderate-confinement waveguides, where the diffuse mode reduces the design flexibility and integration density of photonic integrated circuits. Here, we have developed a high-quality etch mask and a highly selective BCl(3) plasma etch, allowing etching of amorphous alumina waveguides up to 800 nm thick. Using this process, we have fabricated waveguides using an alumina film grown by atomic layer deposition (ALD) which are the lowest-loss high-confinement waveguides for blue light to date: we achieve single-mode propagation losses of 0.8 dB/cm at a propagation wavelength of 450 nm. Nature Publishing Group UK 2023-11-14 /pmc/articles/PMC10645771/ /pubmed/37963923 http://dx.doi.org/10.1038/s41598-023-46877-4 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
McKay, Elissa
Pruiti, Natale G.
May, Stuart
Sorel, Marc
High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title_full High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title_fullStr High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title_full_unstemmed High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title_short High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm
title_sort high-confinement alumina waveguides with sub-db/cm propagation losses at 450 nm
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10645771/
https://www.ncbi.nlm.nih.gov/pubmed/37963923
http://dx.doi.org/10.1038/s41598-023-46877-4
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