Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition

Electron-induced fragmentation of the HFeCo(3)(CO)(12) precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced deposits, they als...

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Detalles Bibliográficos
Autores principales: Winkler, Robert, Brugger-Hatzl, Michele, Porrati, Fabrizio, Kuhness, David, Mairhofer, Thomas, Seewald, Lukas M., Kothleitner, Gerald, Huth, Michael, Plank, Harald, Barth, Sven
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10647607/
https://www.ncbi.nlm.nih.gov/pubmed/37947751
http://dx.doi.org/10.3390/nano13212907

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