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Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves

In this study, we introduce a physical model of a three-dimensional (3D) guided wave sensor called 3D-CMUT, which is based on capacitive micro-machined ultrasonic transducers (CMUTs). This 3D-CMUT sensor is designed to effectively and simultaneously obtain 3D vibration information about ultrasonic g...

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Detalles Bibliográficos
Autores principales:	Zhang, Sai, Lu, Wei, Wang, Ailing, Hao, Guodong, Wang, Renxing, Yilmaz, Mehmet
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10647637/ https://www.ncbi.nlm.nih.gov/pubmed/37960406 http://dx.doi.org/10.3390/s23218706

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