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Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

This paper reports the results of amorphous carbon thin films fabricated by using the gas-impulse-injection magnetron-sputtering method and differing the accelerating voltage (1.0–1.4 kV). The obtained layers were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XRD), and spe...

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Detalles Bibliográficos
Autores principales:	Skowronski, Lukasz, Chodun, Rafal, Trzcinski, Marek, Zdunek, Krzysztof
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10650649/ https://www.ncbi.nlm.nih.gov/pubmed/37959647 http://dx.doi.org/10.3390/ma16217049

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