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Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology fo...
Autores principales: | Bernasconi, Roberto, Invernizzi, Gabriele Pietro, Gallo Stampino, Elisa, Gotti, Riccardo, Gatti, Davide, Magagnin, Luca |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672808/ https://www.ncbi.nlm.nih.gov/pubmed/38004939 http://dx.doi.org/10.3390/mi14112082 |
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