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Electric-Force Conversion Performance of Si-Based LiNbO(3) Devices Based on Four Cantilever Beams

In micron or nano smart sensing systems, piezoelectric cantilever beams are distributed as major components in microsensors, actuators, and energy harvesters. This paper investigates the performance of four cantilever beam devices with “electric-force” conversion based on the inverse piezoelectric e...

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Detalles Bibliográficos
Autores principales:	Zhang, Huiyi, Qiao, Xiaojun, Wei, Huifen, Li, Xiaohuang, Wu, Xiaohui, Yu, Nanxin, Lu, Hao, Guo, Tao, Chou, Xiujian, Geng, Wenping
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672825/ https://www.ncbi.nlm.nih.gov/pubmed/38004845 http://dx.doi.org/10.3390/mi14111988

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