Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors

The quality factor of microelectromechanical resonators is a crucial performance metric and has thus been the subject of numerous studies aimed at maximizing its value by minimizing the anchor loss. This work presents a study on the effect of elastic wave reflectors on the quality factor of MEMS cla...

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Detalles Bibliográficos
Autores principales: Kazemi, Mohammad, Nabavi, Seyedfakhreddin, Gratuze, Mathieu, Nabki, Frederic
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673045/
https://www.ncbi.nlm.nih.gov/pubmed/38004892
http://dx.doi.org/10.3390/mi14112036

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673045/
https://www.ncbi.nlm.nih.gov/pubmed/38004892
http://dx.doi.org/10.3390/mi14112036

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