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Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors
The quality factor of microelectromechanical resonators is a crucial performance metric and has thus been the subject of numerous studies aimed at maximizing its value by minimizing the anchor loss. This work presents a study on the effect of elastic wave reflectors on the quality factor of MEMS cla...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673045/ https://www.ncbi.nlm.nih.gov/pubmed/38004892 http://dx.doi.org/10.3390/mi14112036 |