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Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics
Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673063/ https://www.ncbi.nlm.nih.gov/pubmed/38004982 http://dx.doi.org/10.3390/mi14112125 |
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author | Wang, Lu Guo, Zejing Lan, Qing Song, Wenqing Zhong, Zhipeng Yang, Kunlin Zhao, Tuoyu Huang, Hai Zhang, Cheng Shi, Wu |
author_facet | Wang, Lu Guo, Zejing Lan, Qing Song, Wenqing Zhong, Zhipeng Yang, Kunlin Zhao, Tuoyu Huang, Hai Zhang, Cheng Shi, Wu |
author_sort | Wang, Lu |
collection | PubMed |
description | Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we present an electron-beam (e-beam) doping approach to achieve controllable carrier doping effects in graphene and MoS(2) field-effect transistors (FETs) by leveraging charge-trapping oxide dielectrics. By adding an atomic layer deposition (ALD)-grown Al(2)O(3) dielectric layer on top of the SiO(2)/Si substrate, we demonstrate that controllable and reversible carrier doping effects can be effectively induced in graphene and MoS(2) FETs through e-beam doping. This new device configuration establishes an oxide interface that enhances charge-trapping capabilities, enabling the effective induction of electron and hole doping beyond the SiO(2) breakdown limit using high-energy e-beam irradiation. Importantly, these high doping effects exhibit non-volatility and robust stability in both vacuum and air environments for graphene FET devices. This methodology enhances carrier modulation capabilities in 2D materials and holds great potential for advancing the development of scalable 2D nano-devices. |
format | Online Article Text |
id | pubmed-10673063 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-106730632023-11-19 Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics Wang, Lu Guo, Zejing Lan, Qing Song, Wenqing Zhong, Zhipeng Yang, Kunlin Zhao, Tuoyu Huang, Hai Zhang, Cheng Shi, Wu Micromachines (Basel) Article Two-dimensional (2D) materials, characterized by their atomically thin nature and exceptional properties, hold significant promise for future nano-electronic applications. The precise control of carrier density in these 2D materials is essential for enhancing performance and enabling complex device functionalities. In this study, we present an electron-beam (e-beam) doping approach to achieve controllable carrier doping effects in graphene and MoS(2) field-effect transistors (FETs) by leveraging charge-trapping oxide dielectrics. By adding an atomic layer deposition (ALD)-grown Al(2)O(3) dielectric layer on top of the SiO(2)/Si substrate, we demonstrate that controllable and reversible carrier doping effects can be effectively induced in graphene and MoS(2) FETs through e-beam doping. This new device configuration establishes an oxide interface that enhances charge-trapping capabilities, enabling the effective induction of electron and hole doping beyond the SiO(2) breakdown limit using high-energy e-beam irradiation. Importantly, these high doping effects exhibit non-volatility and robust stability in both vacuum and air environments for graphene FET devices. This methodology enhances carrier modulation capabilities in 2D materials and holds great potential for advancing the development of scalable 2D nano-devices. MDPI 2023-11-19 /pmc/articles/PMC10673063/ /pubmed/38004982 http://dx.doi.org/10.3390/mi14112125 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wang, Lu Guo, Zejing Lan, Qing Song, Wenqing Zhong, Zhipeng Yang, Kunlin Zhao, Tuoyu Huang, Hai Zhang, Cheng Shi, Wu Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title | Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title_full | Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title_fullStr | Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title_full_unstemmed | Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title_short | Controllable Carrier Doping in Two-Dimensional Materials Using Electron-Beam Irradiation and Scalable Oxide Dielectrics |
title_sort | controllable carrier doping in two-dimensional materials using electron-beam irradiation and scalable oxide dielectrics |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673063/ https://www.ncbi.nlm.nih.gov/pubmed/38004982 http://dx.doi.org/10.3390/mi14112125 |
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