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Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

A complete model was developed to simulate the behavior of a circular clamped axisymmetric fluid-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Combining Finite Difference and Boundary Element Matrix (FD-BEM), this model is based on the discretization of the partial differential e...

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Detalles Bibliográficos
Autores principales:	Goepfert, Valentin, Boulmé, Audren, Levassort, Franck, Merrien, Tony, Rouffaud, Rémi, Certon, Dominique
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673182/ https://www.ncbi.nlm.nih.gov/pubmed/38004946 http://dx.doi.org/10.3390/mi14112089

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