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The Nonlinear Dynamics of a MEMS Resonator with a Triangular Tuning Comb

The nonlinear dynamic response of a MEMS resonator with a triangular tuning comb is studied. The motion equation with dis-smooth tuning electrostatic force is derived according to Newton’s second law. The analytical solution of the periodic response is obtained using the harmonic balance method and...

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Detalles Bibliográficos
Autores principales:	Zhang, Lijuan, Zhang, Huabiao, Li, Xinye, Qiao, Ningguo, Gao, Xianping, Ji, Yunxiao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673572/ https://www.ncbi.nlm.nih.gov/pubmed/38004966 http://dx.doi.org/10.3390/mi14112109

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