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Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators
Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the lateral resonances of BAW resonators. Using th...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673604/ https://www.ncbi.nlm.nih.gov/pubmed/38004837 http://dx.doi.org/10.3390/mi14111980 |
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author | Udaondo, Carlos Collado, Carlos Mateu, Jordi |
author_facet | Udaondo, Carlos Collado, Carlos Mateu, Jordi |
author_sort | Udaondo, Carlos |
collection | PubMed |
description | Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the lateral resonances of BAW resonators. Using the precomputed dispersion curves of Lamb waves and an equivalent characteristic impedance for the TE(1) mode, a network of transmission lines is used to calculate the magnitude of field distributions on the electrodes. These characteristics are specific to the stack layer configuration. The model’s implementation is based on nodal Y matrices, from which particle displacement profiles are coupled to the electric domain via piezoelectric constitutive relations. Consequently, the input impedance of the resonator is obtained. The model exhibits strong agreement with FEM simulations of FBARs and SMRs, and with measurements of several SMRs. The proposed model can provide accurate predictions of resonator input impedance, which is around 200 times faster than conventional FEM. |
format | Online Article Text |
id | pubmed-10673604 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-106736042023-10-25 Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators Udaondo, Carlos Collado, Carlos Mateu, Jordi Micromachines (Basel) Article Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the lateral resonances of BAW resonators. Using the precomputed dispersion curves of Lamb waves and an equivalent characteristic impedance for the TE(1) mode, a network of transmission lines is used to calculate the magnitude of field distributions on the electrodes. These characteristics are specific to the stack layer configuration. The model’s implementation is based on nodal Y matrices, from which particle displacement profiles are coupled to the electric domain via piezoelectric constitutive relations. Consequently, the input impedance of the resonator is obtained. The model exhibits strong agreement with FEM simulations of FBARs and SMRs, and with measurements of several SMRs. The proposed model can provide accurate predictions of resonator input impedance, which is around 200 times faster than conventional FEM. MDPI 2023-10-25 /pmc/articles/PMC10673604/ /pubmed/38004837 http://dx.doi.org/10.3390/mi14111980 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Udaondo, Carlos Collado, Carlos Mateu, Jordi Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title | Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title_full | Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title_fullStr | Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title_full_unstemmed | Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title_short | Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators |
title_sort | quasi-3d model for lateral resonances on homogeneous baw resonators |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673604/ https://www.ncbi.nlm.nih.gov/pubmed/38004837 http://dx.doi.org/10.3390/mi14111980 |
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