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Plasma jet takes off.

Thanks to a series of joint research projects by Los Alamos National Laboratory, Beta Squared of Allen, Texas, and the University of California at Los Angeles, there is now a more environmentally sound method for cleaning semiconductor chips that may also be effective in cleaning up chemical, bacter...

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Detalles Bibliográficos
Autor principal: Frazer, L
Formato: Texto
Lenguaje:English
Publicado: 1999
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC1566477/
https://www.ncbi.nlm.nih.gov/pubmed/10417375
_version_ 1782129628265054208
author Frazer, L
author_facet Frazer, L
author_sort Frazer, L
collection PubMed
description Thanks to a series of joint research projects by Los Alamos National Laboratory, Beta Squared of Allen, Texas, and the University of California at Los Angeles, there is now a more environmentally sound method for cleaning semiconductor chips that may also be effective in cleaning up chemical, bacterial, and nuclear contaminants. The Atmospheric Pressure Plasma Jet uses a type of ionized gas called plasma to clean up contaminants by binding to them and lifting them away. In contrast to the corrosive acids and chemical solvents traditionally used to clean semiconductor chips, the jet oxidizes contaminants, producing only benign gaseous by-products such as oxygen and carbon dioxide. The new technology is also easy to transport, cleans thoroughly and quickly, and presents no hazards to its operators.
format Text
id pubmed-1566477
institution National Center for Biotechnology Information
language English
publishDate 1999
record_format MEDLINE/PubMed
spelling pubmed-15664772006-09-19 Plasma jet takes off. Frazer, L Environ Health Perspect Research Article Thanks to a series of joint research projects by Los Alamos National Laboratory, Beta Squared of Allen, Texas, and the University of California at Los Angeles, there is now a more environmentally sound method for cleaning semiconductor chips that may also be effective in cleaning up chemical, bacterial, and nuclear contaminants. The Atmospheric Pressure Plasma Jet uses a type of ionized gas called plasma to clean up contaminants by binding to them and lifting them away. In contrast to the corrosive acids and chemical solvents traditionally used to clean semiconductor chips, the jet oxidizes contaminants, producing only benign gaseous by-products such as oxygen and carbon dioxide. The new technology is also easy to transport, cleans thoroughly and quickly, and presents no hazards to its operators. 1999-08 /pmc/articles/PMC1566477/ /pubmed/10417375 Text en
spellingShingle Research Article
Frazer, L
Plasma jet takes off.
title Plasma jet takes off.
title_full Plasma jet takes off.
title_fullStr Plasma jet takes off.
title_full_unstemmed Plasma jet takes off.
title_short Plasma jet takes off.
title_sort plasma jet takes off.
topic Research Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC1566477/
https://www.ncbi.nlm.nih.gov/pubmed/10417375
work_keys_str_mv AT frazerl plasmajettakesoff