Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sen...

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Detalles Bibliográficos
Autores principales: Park, Jae Young, Choi, Sun-Woo, Kim, Sang Sub
Formato: Texto
Lenguaje:English
Publicado: Springer 2009
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893860/
https://www.ncbi.nlm.nih.gov/pubmed/20672125
http://dx.doi.org/10.1007/s11671-009-9487-3
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author Park, Jae Young
Choi, Sun-Woo
Kim, Sang Sub
author_facet Park, Jae Young
Choi, Sun-Woo
Kim, Sang Sub
author_sort Park, Jae Young
collection PubMed
description We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.
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spelling pubmed-28938602010-07-28 Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays Park, Jae Young Choi, Sun-Woo Kim, Sang Sub Nanoscale Res Lett Nano Express We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors. Springer 2009-11-18 /pmc/articles/PMC2893860/ /pubmed/20672125 http://dx.doi.org/10.1007/s11671-009-9487-3 Text en Copyright ©2009 to the authors
spellingShingle Nano Express
Park, Jae Young
Choi, Sun-Woo
Kim, Sang Sub
Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title_full Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title_fullStr Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title_full_unstemmed Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title_short Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
title_sort fabrication of a highly sensitive chemical sensor based on zno nanorod arrays
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893860/
https://www.ncbi.nlm.nih.gov/pubmed/20672125
http://dx.doi.org/10.1007/s11671-009-9487-3
work_keys_str_mv AT parkjaeyoung fabricationofahighlysensitivechemicalsensorbasedonznonanorodarrays
AT choisunwoo fabricationofahighlysensitivechemicalsensorbasedonznonanorodarrays
AT kimsangsub fabricationofahighlysensitivechemicalsensorbasedonznonanorodarrays

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