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Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sen...
| Autores principales: | , , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893860/ https://www.ncbi.nlm.nih.gov/pubmed/20672125 http://dx.doi.org/10.1007/s11671-009-9487-3 |