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Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD
We report on the thermally induced changes of the nano-structural and optical properties of hydrogenated nanocrystalline silicon in the temperature range 200–700 °C. The as-deposited sample has a high crystalline volume fraction of 53% with an average crystallite size of ~3.9 nm, where 66% of the to...
Autores principales: | , , , , , , , |
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Formato: | Texto |
Lenguaje: | English |
Publicado: |
Springer
2009
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893958/ https://www.ncbi.nlm.nih.gov/pubmed/20596406 http://dx.doi.org/10.1007/s11671-008-9243-0 |