Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and...

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Detalles Bibliográficos
Autores principales: Losurdo, Maria, Bergmair, Michael, Bruno, Giovanni, Cattelan, Denis, Cobet, Christoph, de Martino, Antonello, Fleischer, Karsten, Dohcevic-Mitrovic, Zorana, Esser, Norbert, Galliet, Melanie, Gajic, Rados, Hemzal, Dušan, Hingerl, Kurt, Humlicek, Josef, Ossikovski, Razvigor, Popovic, Zoran V., Saxl, Ottilia
Formato: Texto
Lenguaje:English
Publicado: Springer Netherlands 2009
Materias:
Perspectives
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2988221/
https://www.ncbi.nlm.nih.gov/pubmed/21170135
http://dx.doi.org/10.1007/s11051-009-9662-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2988221/
https://www.ncbi.nlm.nih.gov/pubmed/21170135
http://dx.doi.org/10.1007/s11051-009-9662-6

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