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Filtering of Defects in Semipolar (11−22) GaN Using 2-Steps Lateral Epitaxial Overgrowth

Good-quality (11−22) semipolar GaN sample was obtained using epitaxial lateral overgrowth. The growth conditions were chosen to enhance the growth rate along the [0001] inclined direction. Thus, the coalescence boundaries stop the propagation of basal stacking faults. The faults filtering and the im...

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Detalles Bibliográficos
Autores principales: Kriouche, N, Leroux, M, Vennéguès, P, Nemoz, M, Nataf, G, de Mierry, P
Formato: Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991163/
https://www.ncbi.nlm.nih.gov/pubmed/21170140
http://dx.doi.org/10.1007/s11671-010-9724-9