Ordered Arrays of SiGe Islands from Low-Energy PECVD

SiGe islands have been proposed for applications in the fields of microelectronics, optoelectronics and thermoelectrics. Although most of the works in literature are based on MBE, one of the possible advantages of low-energy plasma-enhanced chemical vapor deposition (LEPECVD) is a wider range of dep...

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Detalles Bibliográficos
Autores principales: Bollani, M, Bonera, E, Chrastina, D, Fedorov, A, Montuori, V, Picco, A, Tagliaferri, A, Vanacore, G, Sordan, R
Formato: Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Special Issue Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991192/
https://www.ncbi.nlm.nih.gov/pubmed/21170397
http://dx.doi.org/10.1007/s11671-010-9773-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991192/
https://www.ncbi.nlm.nih.gov/pubmed/21170397
http://dx.doi.org/10.1007/s11671-010-9773-0

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