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Ordered Arrays of SiGe Islands from Low-Energy PECVD
SiGe islands have been proposed for applications in the fields of microelectronics, optoelectronics and thermoelectrics. Although most of the works in literature are based on MBE, one of the possible advantages of low-energy plasma-enhanced chemical vapor deposition (LEPECVD) is a wider range of dep...
| Autores principales: | , , , , , , , , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2010
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991192/ https://www.ncbi.nlm.nih.gov/pubmed/21170397 http://dx.doi.org/10.1007/s11671-010-9773-0 |