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Schottky barrier SOI-MOSFETs with high-k La(2)O(3)/ZrO(2) gate dielectrics

Schottky barrier SOI-MOSFETs incorporating a La(2)O(3)/ZrO(2) high-k dielectric stack deposited by atomic layer deposition are investigated. As the La precursor tris(N,N′-diisopropylformamidinato) lanthanum is used. As a mid-gap metal gate electrode TiN capped with W is applied. Processing parameter...

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Detalles Bibliográficos
Autores principales:	Henkel, C., Abermann, S., Bethge, O., Pozzovivo, G., Klang, P., Stöger-Pollach, M., Bertagnolli, E.
Formato:	Texto
Lenguaje:	English
Publicado:	Elsevier 2011
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3065308/ https://www.ncbi.nlm.nih.gov/pubmed/21461054 http://dx.doi.org/10.1016/j.mee.2010.11.003

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