Formation of SiC nanoparticles in an atmospheric microwave plasma

We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm accord...

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Autores principales: Vennekamp, Martin, Bauer, Ingolf, Groh, Matthias, Sperling, Evgeni, Ueberlein, Susanne, Myndyk, Maksym, Mäder, Gerrit, Kaskel, Stefan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2011
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3201619/
https://www.ncbi.nlm.nih.gov/pubmed/22043455
http://dx.doi.org/10.3762/bjnano.2.71
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author Vennekamp, Martin
Bauer, Ingolf
Groh, Matthias
Sperling, Evgeni
Ueberlein, Susanne
Myndyk, Maksym
Mäder, Gerrit
Kaskel, Stefan
author_facet Vennekamp, Martin
Bauer, Ingolf
Groh, Matthias
Sperling, Evgeni
Ueberlein, Susanne
Myndyk, Maksym
Mäder, Gerrit
Kaskel, Stefan
author_sort Vennekamp, Martin
collection PubMed
description We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm according to BET and XRD measurements are produced. The dependency of the particle size on the process parameters is evaluated statistically and explained with growth-rate equations derived from the theory of Ostwald ripening. The results show that the particle size is mainly influenced by the concentration of the precursor material in the plasma.
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spelling pubmed-32016192011-10-31 Formation of SiC nanoparticles in an atmospheric microwave plasma Vennekamp, Martin Bauer, Ingolf Groh, Matthias Sperling, Evgeni Ueberlein, Susanne Myndyk, Maksym Mäder, Gerrit Kaskel, Stefan Beilstein J Nanotechnol Full Research Paper We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm according to BET and XRD measurements are produced. The dependency of the particle size on the process parameters is evaluated statistically and explained with growth-rate equations derived from the theory of Ostwald ripening. The results show that the particle size is mainly influenced by the concentration of the precursor material in the plasma. Beilstein-Institut 2011-10-07 /pmc/articles/PMC3201619/ /pubmed/22043455 http://dx.doi.org/10.3762/bjnano.2.71 Text en Copyright © 2011, Vennekamp et al. https://creativecommons.org/licenses/by/2.0https://www.beilstein-journals.org/bjnano/termsThis is an Open Access article under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano/terms)
spellingShingle Full Research Paper
Vennekamp, Martin
Bauer, Ingolf
Groh, Matthias
Sperling, Evgeni
Ueberlein, Susanne
Myndyk, Maksym
Mäder, Gerrit
Kaskel, Stefan
Formation of SiC nanoparticles in an atmospheric microwave plasma
title Formation of SiC nanoparticles in an atmospheric microwave plasma
title_full Formation of SiC nanoparticles in an atmospheric microwave plasma
title_fullStr Formation of SiC nanoparticles in an atmospheric microwave plasma
title_full_unstemmed Formation of SiC nanoparticles in an atmospheric microwave plasma
title_short Formation of SiC nanoparticles in an atmospheric microwave plasma
title_sort formation of sic nanoparticles in an atmospheric microwave plasma
topic Full Research Paper
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3201619/
https://www.ncbi.nlm.nih.gov/pubmed/22043455
http://dx.doi.org/10.3762/bjnano.2.71
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