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Formation of SiC nanoparticles in an atmospheric microwave plasma

We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm accord...

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Detalles Bibliográficos
Autores principales:	Vennekamp, Martin, Bauer, Ingolf, Groh, Matthias, Sperling, Evgeni, Ueberlein, Susanne, Myndyk, Maksym, Mäder, Gerrit, Kaskel, Stefan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2011
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3201619/ https://www.ncbi.nlm.nih.gov/pubmed/22043455 http://dx.doi.org/10.3762/bjnano.2.71

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