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Impact of AFM-induced nano-pits in a-Si:H films on silicon crystal growth

Conductive tips in atomic force microscopy (AFM) can be used to localize field-enhanced metal-induced solid-phase crystallization (FE-MISPC) of amorphous silicon (a-Si:H) at room temperature down to nanoscale dimensions. In this article, the authors show that such local modifications can be used to...

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Detalles Bibliográficos
Autores principales:	Verveniotis, Elisseos, Rezek, Bohuslav, Šípek, Emil, Stuchlík, Jiří, Ledinský, Martin, Kočka, Jan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2011
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211195/ https://www.ncbi.nlm.nih.gov/pubmed/21711664 http://dx.doi.org/10.1186/1556-276X-6-145

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