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Effect of the Nd content on the structural and photoluminescence properties of silicon-rich silicon dioxide thin films
In this article, the microstructure and photoluminescence (PL) properties of Nd-doped silicon-rich silicon oxide (SRSO) are reported as a function of the annealing temperature and the Nd concentration. The thin films, which were grown on Si substrates by reactive magnetron co-sputtering, contain the...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211213/ https://www.ncbi.nlm.nih.gov/pubmed/21711673 http://dx.doi.org/10.1186/1556-276X-6-161 |