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Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes
Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a vers...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211272/ https://www.ncbi.nlm.nih.gov/pubmed/21711738 http://dx.doi.org/10.1186/1556-276X-6-215 |