Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The...

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Autores principales: Jiang, Xiaohong, Wu, Guoyun, Zhou, Jingfang, Wang, Shujie, Tseng, Ampere A, Du, Zuliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212057/
https://www.ncbi.nlm.nih.gov/pubmed/21888633
http://dx.doi.org/10.1186/1556-276X-6-518
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author Jiang, Xiaohong
Wu, Guoyun
Zhou, Jingfang
Wang, Shujie
Tseng, Ampere A
Du, Zuliang
author_facet Jiang, Xiaohong
Wu, Guoyun
Zhou, Jingfang
Wang, Shujie
Tseng, Ampere A
Du, Zuliang
author_sort Jiang, Xiaohong
collection PubMed
description Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and number of scratches but decreases slightly with scratch speed. Complex nanostructures of arrays of parallel lines and square arrays are further fabricated uniformly and precisely on Si substrates at relatively high scratch speed. DLC-coated Si probe has the potential to be an alternative in AFM-based scratch nanofabrication on hard surfaces.
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spelling pubmed-32120572011-11-09 Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe Jiang, Xiaohong Wu, Guoyun Zhou, Jingfang Wang, Shujie Tseng, Ampere A Du, Zuliang Nanoscale Res Lett Nano Express Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and number of scratches but decreases slightly with scratch speed. Complex nanostructures of arrays of parallel lines and square arrays are further fabricated uniformly and precisely on Si substrates at relatively high scratch speed. DLC-coated Si probe has the potential to be an alternative in AFM-based scratch nanofabrication on hard surfaces. Springer 2011-09-02 /pmc/articles/PMC3212057/ /pubmed/21888633 http://dx.doi.org/10.1186/1556-276X-6-518 Text en Copyright ©2011 Jiang et al; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Jiang, Xiaohong
Wu, Guoyun
Zhou, Jingfang
Wang, Shujie
Tseng, Ampere A
Du, Zuliang
Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title_full Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title_fullStr Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title_full_unstemmed Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title_short Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe
title_sort nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (dlc)-coated si probe
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212057/
https://www.ncbi.nlm.nih.gov/pubmed/21888633
http://dx.doi.org/10.1186/1556-276X-6-518
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