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Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The...

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Detalles Bibliográficos
Autores principales:	Jiang, Xiaohong, Wu, Guoyun, Zhou, Jingfang, Wang, Shujie, Tseng, Ampere A, Du, Zuliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2011
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212057/ https://www.ncbi.nlm.nih.gov/pubmed/21888633 http://dx.doi.org/10.1186/1556-276X-6-518

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