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The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric Cantilevers
In this study, flat piezoelectric microcantilevers were fabricated under low-stress Pb(Zr(0.52)Ti(0.48))O(3) (PZT) film conditions. They were analyzed using the Raman spectrum and wafer curvature methods. Based on the residual stress analysis, we found that a thickness of 1 μm was critical, since st...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2010
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212087/ https://www.ncbi.nlm.nih.gov/pubmed/27502677 http://dx.doi.org/10.1007/s11671-010-9810-z |