Direct synthesis and characterization of optically transparent conformal zinc oxide nanocrystalline thin films by rapid thermal plasma CVD

We report a rapid, self-catalyzed, solid precursor-based thermal plasma chemical vapor deposition process for depositing a conformal, nonporous, and optically transparent nanocrystalline ZnO thin film at 130 Torr (0.17 atm). Pure solid zinc is inductively heated and melted, followed by ionization by...

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Detalles Bibliográficos
Autores principales: Pedersen, Joachim D, Esposito, Heather J, Teh, Kwok Siong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3227690/
https://www.ncbi.nlm.nih.gov/pubmed/22040295
http://dx.doi.org/10.1186/1556-276X-6-568

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3227690/
https://www.ncbi.nlm.nih.gov/pubmed/22040295
http://dx.doi.org/10.1186/1556-276X-6-568

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