Novel Designs for Application Specific MEMS Pressure Sensors

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and hig...

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Detalles Bibliográficos
Autores principales: Fragiacomo, Giulio, Reck, Kasper, Lorenzen, Lasse, Thomsen, Erik V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231033/
https://www.ncbi.nlm.nih.gov/pubmed/22163425
http://dx.doi.org/10.3390/s101109541

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231033/
https://www.ncbi.nlm.nih.gov/pubmed/22163425
http://dx.doi.org/10.3390/s101109541

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