Cargando…

Novel Designs for Application Specific MEMS Pressure Sensors

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and hig...

Descripción completa

Detalles Bibliográficos
Autores principales:	Fragiacomo, Giulio, Reck, Kasper, Lorenzen, Lasse, Thomsen, Erik V.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2010
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231033/ https://www.ncbi.nlm.nih.gov/pubmed/22163425 http://dx.doi.org/10.3390/s101109541

Ejemplares similares

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing
por: Reck, Kasper, et al.
Publicado: (2011)

A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
por: Meng, Qinggang, et al.
Publicado: (2023)

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors
por: Wan, Yuanjie, et al.
Publicado: (2022)

Recent Progress of Miniature MEMS Pressure Sensors
por: Song, Peishuai, et al.
Publicado: (2020)

AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
por: Miguel, Jose Angel, et al.
Publicado: (2018)

Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile
por: Liu, Xueying, et al.
Publicado: (2020)

Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System
por: Zhang, Jiahong, et al.
Publicado: (2018)

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology
por: Song, Peishuai, et al.
Publicado: (2020)

An update on the CardioMEMS pulmonary artery pressure sensor
por: Ayyadurai, Puvanalingam, et al.
Publicado: (2019)

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping
por: Lee, Chia-Yen, et al.
Publicado: (2021)

A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
por: Wang, Honghui, et al.
Publicado: (2022)

MEMS Differential Pressure Sensor with Dynamic Pressure Canceler for Precision Altitude Estimation
por: Yasunaga, Shun, et al.
Publicado: (2023)

Design of the MEMS Piezoresistive Electronic Heart Sound Sensor
por: Zhang, Guojun, et al.
Publicado: (2016)

Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing
por: Liu, Yaxin, et al.
Publicado: (2009)

High Sensitivity MEMS Strain Sensor: Design and Simulation
por: Mohammed, Ahmed A. S., et al.
Publicado: (2008)

A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors
por: Deng, Mingxing, et al.
Publicado: (2022)

Compact Sphere-Shaped Airflow Vector Sensor Based on MEMS Differential Pressure Sensors
por: Haneda, Kotaro, et al.
Publicado: (2022)

Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
por: Hasenkamp, Willyan, et al.
Publicado: (2012)

An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
por: Zhang, Lan, et al.
Publicado: (2022)

The Application of Quaternions to Strap-Down MEMS Sensor Data
por: Dickson, Peter M., et al.
Publicado: (2021)

Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
por: Pavlin, Marko, et al.
Publicado: (2011)

Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor
por: Zhang, Yunfan, et al.
Publicado: (2021)

Design of a Novel Medical Acoustic Sensor Based on MEMS Bionic Fish Ear Structure
por: Zhou, Chenzheng, et al.
Publicado: (2022)

Design of a Novel MEMS Gyroscope Array
por: Wang, Wei, et al.
Publicado: (2013)

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements
por: Zhou, Ning, et al.
Publicado: (2020)

Relative Contributions of Packaging Elements to the Thermal Hysteresis of a MEMS Pressure Sensor
por: Hamid, Youssef, et al.
Publicado: (2020)

A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
por: Qi, Yonghong, et al.
Publicado: (2022)

A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications
por: Pérez Sanjurjo, Javier, et al.
Publicado: (2017)

A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
por: Wang, Suwei, et al.
Publicado: (2022)

Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application
por: Lai, Wei-Hsi, et al.
Publicado: (2023)

MEMS and Nanotechnology for Gas Sensors
por: Roy, Sunipa, et al.
Publicado: (2015)

Overview of the MEMS Pirani Sensors
por: Xu, Shaohang, et al.
Publicado: (2022)

Editorial for the Special Issue on MEMS/NEMS Sensors: Fabrication and Application
por: Koley, Goutam
Publicado: (2019)

Application of the MEMS Accelerometer as the Position Sensor in Linear Electrohydraulic Drive
por: Rybarczyk, Dominik
Publicado: (2021)

MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics
por: Bayer, Ilker S.
Publicado: (2022)

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges
por: Herrera-May, Agustín Leobardo, et al.
Publicado: (2016)

Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
por: Wang, Yucai, et al.
Publicado: (2015)

Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor
por: Yusof, Norliana, et al.
Publicado: (2021)

Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities
por: de Clerck, Albrey, et al.
Publicado: (2022)

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere
por: Liu, Daosen, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_q74s1cu5s4dpv7ljjcn9ire82m