Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector

A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To ac...

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Detalles Bibliográficos
Autores principales: Zhang, Chi, You, Zheng, Huang, Hu, Li, Guanhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231111/
https://www.ncbi.nlm.nih.gov/pubmed/22163580
http://dx.doi.org/10.3390/s100706848

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231111/
https://www.ncbi.nlm.nih.gov/pubmed/22163580
http://dx.doi.org/10.3390/s100706848

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