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Design and Characterization of a High Resolution Microfluidic Heat Flux Sensor with Thermal Modulation
A complementary metal-oxide semiconductor-compatible process was used in the design and fabrication of a suspended membrane microfluidic heat flux sensor with a thermopile for the purpose of measuring the heat flow rate. The combination of a thirty-junction gold and nickel thermoelectric sensor with...
Autores principales: | Nam, Sung-Ki, Kim, Jung-Kyun, Cho, Sung-Cheon, Lee, Sun-Kyu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231132/ https://www.ncbi.nlm.nih.gov/pubmed/22163568 http://dx.doi.org/10.3390/s100706594 |
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