Modeling of Beams’ Multiple-Contact Mode with an Application in the Design of a High-g Threshold Microaccelerometer

Beam’s multiple-contact mode, characterized by multiple and discrete contact regions, non-uniform stoppers’ heights, irregular contact sequence, seesaw-like effect, indirect interaction between different stoppers, and complex coupling relationship between loads and deformation is studied. A novel analysis method and a novel high speed calculation model are developed for multiple-contact mode under mechanical load and electrostatic load, without limitations on stopper height and distribution, providing the beam has stepped or curved shape. Accurate values of deflection, contact load, contact region and so on are obtained directly, with a subsequent validation by CoventorWare. A new concept design of high-g threshold microaccelerometer based on multiple-contact mode is presented, featuring multiple acceleration thresholds of one sensitive component and consequently small sensor size.