Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the mi...

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Detalles Bibliográficos
Autores principales: Mariani, Stefano, Ghisi, Aldo, Corigliano, Alberto, Martini, Roberto, Simoni, Barbara
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231397/
https://www.ncbi.nlm.nih.gov/pubmed/22163885
http://dx.doi.org/10.3390/s110504972

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231397/
https://www.ncbi.nlm.nih.gov/pubmed/22163885
http://dx.doi.org/10.3390/s110504972

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