A Standard CMOS Humidity Sensor without Post-Processing

A 2 μW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023–10 hu...

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Detalles Bibliográficos
Autores principales: Nizhnik, Oleg, Higuchi, Kohei, Maenaka, Kazusuke
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231417/
https://www.ncbi.nlm.nih.gov/pubmed/22163949
http://dx.doi.org/10.3390/s110606197
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author Nizhnik, Oleg
Higuchi, Kohei
Maenaka, Kazusuke
author_facet Nizhnik, Oleg
Higuchi, Kohei
Maenaka, Kazusuke
author_sort Nizhnik, Oleg
collection PubMed
description A 2 μW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023–10 humidity-sensitive layer, and a CMOS capacitance to voltage converter.
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spelling pubmed-32314172011-12-07 A Standard CMOS Humidity Sensor without Post-Processing Nizhnik, Oleg Higuchi, Kohei Maenaka, Kazusuke Sensors (Basel) Article A 2 μW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023–10 humidity-sensitive layer, and a CMOS capacitance to voltage converter. Molecular Diversity Preservation International (MDPI) 2011-06-08 /pmc/articles/PMC3231417/ /pubmed/22163949 http://dx.doi.org/10.3390/s110606197 Text en © 2011 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Nizhnik, Oleg
Higuchi, Kohei
Maenaka, Kazusuke
A Standard CMOS Humidity Sensor without Post-Processing
title A Standard CMOS Humidity Sensor without Post-Processing
title_full A Standard CMOS Humidity Sensor without Post-Processing
title_fullStr A Standard CMOS Humidity Sensor without Post-Processing
title_full_unstemmed A Standard CMOS Humidity Sensor without Post-Processing
title_short A Standard CMOS Humidity Sensor without Post-Processing
title_sort standard cmos humidity sensor without post-processing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231417/
https://www.ncbi.nlm.nih.gov/pubmed/22163949
http://dx.doi.org/10.3390/s110606197
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