Review on the Modeling of Electrostatic MEMS

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduc...

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Detalles Bibliográficos
Autores principales: Chuang, Wan-Chun, Lee, Hsin-Li, Chang, Pei-Zen, Hu, Yuh-Chung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3247752/
https://www.ncbi.nlm.nih.gov/pubmed/22219707
http://dx.doi.org/10.3390/s100606149
Descripción
Sumario:Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

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